@misc{indiciae488499b58f91,
  title = {Electron distribution function in a low-pressure inductively coupled plasma.},
  author = {VI Kolobov and WN Hitchon},
  year = {1995},
  doi = {10.1103/physreve.52.972},
  url = {https://pubmed.ncbi.nlm.nih.gov/9963502/},
  note = {Source identifier: 9963502}
}