TY  - RPRT
TI  - Electron distribution function in a low-pressure inductively coupled plasma.
AU  - VI Kolobov
AU  - WN Hitchon
PY  - 1995
DO  - 10.1103/physreve.52.972
UR  - https://pubmed.ncbi.nlm.nih.gov/9963502/
ID  - 9963502
ER  -