@misc{indiciaefc04114e3ccd,
  title = {Deconvolution of Rutherford backscattering spectra: An inverse problem.},
  author = {H Ellmer and D Semrad},
  year = {1996},
  doi = {10.1103/physreve.54.3569},
  url = {https://pubmed.ncbi.nlm.nih.gov/9965503/},
  note = {Source identifier: 9965503}
}