TY  - RPRT
TI  - Deconvolution of Rutherford backscattering spectra: An inverse problem.
AU  - H Ellmer
AU  - D Semrad
PY  - 1996
DO  - 10.1103/physreve.54.3569
UR  - https://pubmed.ncbi.nlm.nih.gov/9965503/
ID  - 9965503
ER  -