@misc{indiciaec240d479ab22,
  title = {Implantation-induced structural changes in evaporated amorphous Ge.},
  author = {G Petö and ZF Horváth and O Gereben and L Pusztai and F Hajdú and E Sváb},
  year = {1994},
  doi = {10.1103/physrevb.50.539},
  url = {https://pubmed.ncbi.nlm.nih.gov/9974573/},
  note = {Source identifier: 9974573}
}