@misc{indiciae89770f0da2e5,
  title = {Range profiles in self-ion-implanted crystalline Si.},
  author = {K Nordlund and J Keinonen and E Rauhala and T Ahlgren},
  year = {1995},
  doi = {10.1103/physrevb.52.15170},
  url = {https://pubmed.ncbi.nlm.nih.gov/9980871/},
  note = {Source identifier: 9980871}
}