@misc{indiciaea30058dcda81,
  title = {Analytical Microscopy in the Real Semiconductor Processing World.},
  author = {R Anderson},
  year = {1998},
  doi = {10.1017/s1431927698980436},
  url = {https://pubmed.ncbi.nlm.nih.gov/9990868/},
  note = {Source identifier: 9990868}
}