@misc{indiciae02d1d0806fe3, title = {Microvoids at the SiO2/Si interface.}, author = {B Nielsen and KG Lynn and DO Welch and TC Leung and GW Rubloff}, year = {1989}, doi = {10.1103/physrevb.40.1434}, url = {https://pubmed.ncbi.nlm.nih.gov/9991995/}, note = {Source identifier: 9991995} }