@misc{indiciaecdca8c4b2f17,
  title = {Ion-beam-induced damage in silicon studied using variable-energy positrons, Rutherford backscattering, and infrared absorption.},
  author = {PJ Simpson and M Vos and IV Mitchell and C Wu and PJ Schultz},
  year = {1991},
  doi = {10.1103/physrevb.44.12180},
  url = {https://pubmed.ncbi.nlm.nih.gov/9999374/},
  note = {Source identifier: 9999374}
}