TY  - RPRT
TI  - Ion-beam-induced damage in silicon studied using variable-energy positrons, Rutherford backscattering, and infrared absorption.
AU  - PJ Simpson
AU  - M Vos
AU  - IV Mitchell
AU  - C Wu
AU  - PJ Schultz
PY  - 1991
DO  - 10.1103/physrevb.44.12180
UR  - https://pubmed.ncbi.nlm.nih.gov/9999374/
ID  - 9999374
ER  -