@misc{indiciaee673ea71da55, title = {Ab initio studies of silane decomposition on Si(100).}, author = {Z Jing and JL Whitten}, year = {1991}, doi = {10.1103/physrevb.44.1741}, url = {https://pubmed.ncbi.nlm.nih.gov/9999708/}, note = {Source identifier: 9999708} }