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PubMed · 10444296

High resolution electron backscatter diffraction with a field emission gun scanning electron microscope.

F J Humphreys·I Brough
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Abstract

A scanning electron microscope with a thermal field emission gun (FEGSEM) is found to offer significant improvements in electron backscatter diffraction performance over a conventional W-filament scanning microscope. The spatial resolution is improved by a factor of approximately 3 in the FEGSEM and is optimized at probe currents of 50-300 nA and at 10-15 keV. The angular accuracy is optimized at probe currents above approximately 150 nA and at 30 keV.

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Microscopy, Electron, ScanningJournal ArticleResearch Support, Non-U.S. Gov't

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F J Humphreys, I Brough. 1999. High resolution electron backscatter diffraction with a field emission gun scanning electron microscope.. https://pubmed.ncbi.nlm.nih.gov/10444296/

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