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Interdigitated humidity sensors for a portable clinical microsystem.

Céline Laville·Claude Pellet
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Abstract

This paper presents and compares two capacitive humidity sensors with interdigitated electrodes for a portable clinical application. A polyimide-sensitive layer covers the first structures and the optimized ones include a benzocyclobutene-sensitive layer and a heating resistor. Humidity measurements results are presented, in particular sensors response time in absorption, which are very small (inferior to 500 ms). Next, mechanisms of absorption and adsorption in a polymer layer are described and the two structures are compared. Suitability of optimized sensors for our application is discussed: new structures allow us to increase sensitivity and decrease response time. When the structure is maintained at 40 degrees C by its heater, the response time is 200 ms and the total desorption time is 11 s.

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AdsorptionAluminumBiosensing TechniquesElectric CapacitanceEquipment DesignEquipment FailureHeatingHumidityMicroelectrodesMiniaturizationMonitoring, PhysiologicResins, SyntheticSensitivity and SpecificityJournal Article

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Céline Laville, Claude Pellet. 2002. Interdigitated humidity sensors for a portable clinical microsystem.. https://doi.org/10.1109/tbme.2002.802052

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