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PubMed · 12703922

Electrostatic micromachine scanning mirror for optical coherence tomography.

J M Zara·S Yazdanfar·K D Rao·J A Izatt·S W Smith
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Abstract

Compact electrostatic micromirror structures for use in the scanning arm of an optical coherence tomography (OCT) system are described. These devices consist of millimeter-scale mirrors resting upon micrometer-scale polyimide hinges that are tilted by a linear micromachine actuator, the integrated force array (IFA). The IFA is a network of deformable capacitor cells that electrostatically contract with an applied voltage. The support structures, hinges, and actuators are fabricated by photolithography from polyimide-upon-silicon wafers. These devices were inserted into the scanning arm of an experimental OCT imaging system to produce in vitro and in vivo images at frame rates of 4 to 8 Hz.

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ElectricityTomographyJournal ArticleResearch Support, U.S. Gov't, P.H.S.

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BibTeXRIS

J M Zara, S Yazdanfar, K D Rao, J A Izatt, S W Smith. 2003-04-15. Electrostatic micromachine scanning mirror for optical coherence tomography.. https://doi.org/10.1364/ol.28.000628

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