Easy-to-prepare assembly array of Tungsten microelectrodes.

Hirokazu Takahashi; Jun Suzurikawa; Masayuki Nakao; Fumio Mase; Kimitaka Kaga

doi:10.1109/tbme.2005.845224

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Easy-to-prepare assembly array of Tungsten microelectrodes.

Hirokazu Takahashi·Jun Suzurikawa·Masayuki Nakao·Fumio Mase·Kimitaka Kaga

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Abstract

This paper provides a detailed process flow for fabricating an easy-to-prepare, inexpensive, dense array of tungsten microelectrodes. We designed the process flow to minimize routine tasks by separating an initial preparation of a master mold from a routine preparation of substrate replication, array assembly and tip processing. Sandblast processing first produced a glass mold with a pattern of a series of protruding lines at a requested interval of a few hundred micrometers. Copying the groove pattern onto polystyrene mass-produced a replica substrate. Tungsten probes were then aligned on the substrate, and the tips of probes were finely processed in the block.

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Hirokazu Takahashi, Jun Suzurikawa, Masayuki Nakao, Fumio Mase, Kimitaka Kaga. 2005. Easy-to-prepare assembly array of Tungsten microelectrodes.. https://doi.org/10.1109/tbme.2005.845224

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