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Scanning transmission electron microscopy at high resolution.

J Wall·J Langmore·M Isaacson·A V Crewe
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Abstract

We have shown that a scanning transmission electron microscope with a high brightness field emission source is capable of obtaining better than 3 A resolution using 30 to 40 keV electrons. Elastic dark field images of single atoms of uranium and mercury are shown which demonstrate this fact as determined by a modified Rayleigh criterion. Point-to-point micrograph resolution between 2.5 and 3.0 A is found in dark field images of micro-crystallites of uranium and thorium compounds. Furthermore, adequate contrast is available to observe single atoms as light as silver.

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CrystallographyMercuryMicroscopy, Electron, ScanningSilverThoriumUraniumJournal Article

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J Wall, J Langmore, M Isaacson, A V Crewe. 1974. Scanning transmission electron microscopy at high resolution.. https://doi.org/10.1073/pnas.71.1.1

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