Nanometer spatial resolution achieved in hard x-ray imaging and Laue diffraction experiments.

D H Bilderback; S A Hoffman; D J Thiel

doi:10.1126/science.8284671

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PubMed · 8284671

Nanometer spatial resolution achieved in hard x-ray imaging and Laue diffraction experiments.

D H Bilderback·S A Hoffman·D J Thiel

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Abstract

Tapered glass capillaries have successfully condensed hard x-ray beams to ultrasmall dimensions providing unprecedented spatial resolution for the characterization of materials. A spatial resolution of 50 nanometers was obtained while imaging a lithographically prepared gold pattern with x-rays in the energy range of 5 to 8 kiloelectron volts. This is the highest resolution scanning x-ray image made to date with hard x-rays. With a beam 360 nanometers in diameter, Laue diffraction was observed from the smallest sample volume ever probed by x-ray diffraction, 5 x 10(-3) cubic micrometers.

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Crystallography, X-Ray Gold Image Processing, Computer-Assisted Muramidase Synchrotrons X-Ray Diffraction X-Rays Journal Article Research Support, U.S. Gov't, Non-P.H.S.Research Support, U.S. Gov't, P.H.S.

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D H Bilderback, S A Hoffman, D J Thiel. 1994-01-14. Nanometer spatial resolution achieved in hard x-ray imaging and Laue diffraction experiments.. https://doi.org/10.1126/science.8284671

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