Biomedical subjects

Qi-liang Ni

Publications and source records attributed to Qi-liang Ni.

4 recordsLinked to original sources

PubMed2005

[Development of soft X-ray and vacuum ultraviolet spectrum sources].

The soft X-ray and vacuum ultraviolet sources developed in CIOMP are presented. The wall-stabilized argon arc source with spectrum stability and repeatability of +/-0.3% is applied to the calibration of spectrum intensity distribution of the vacuum ultraviolet instruments as an absolute standard source. The Penning source, duobplasma source and hollow cathode source are able to produce atomic and ionic line spectra as a wavelength standard source, which covers a few nanometers to several tens nanometers with spectrum radiation stability and repeatability of +/-1.0%. In particular, the low debris laser produced plasma source with liquid aerosol spray target recently developed can emit stronger soft X-ray for soft X-ray lithography and metrology, which has a transfer efficiency as high as 0.75%/2pi x sr/2% bandwidth.

Aluminum↗

PubMed2005

[Soft X-ray reflectometer with laser produced plasma source].

A soft X-ray reflectometor with laser-produced plasma source developed in the authorial lab is presented for the measurements of efficiencies of gratings, transmission of filter and reflectance of multilayer coatings. The reflectometer is composed of a soft X-ray laser-produced plasma source, a grazing incidence monochromator with a constant deviation angle, a vacuum chamber, a sample table, a photo-electronic unit and a computer controlling unit. The working wavelength is from 8 to 30 nm and the maximum sample size is 130 mm long by 120 mm wide by 120 mm high. In order to test the performances of the reflectometer, the reflectivity of multilayer coatings was obtained by using this device. The measured results agree well with the theoretical calculation. The reproducibility of measured reflectance is +/-0.6%.

Algorithms↗

PubMed2004

[Method to measure spectrum intensity from laser plasma soft X-ray source].

This paper presents a method to detect and measure spectrum intensity from a laser plasma soft X-ray source. A Channel Electron Multiplier (CEM) and a calibrated silicon photodiode were used as detectors in this method, the former is a nonstandard detector and the latter is a standard one. Charge-sensitive preamplifiers were used for measuring total charges generated by detectors, and a monochromator with high resolution was employed as the spectrometer. The formulae to calculate spectrum intensity from laser plasma soft X-ray source was given, based on the known grating efficiency of the monochromator, CEM's gain and responsivity of the silicon photodiode to photons.

Equipment Design↗

PubMed2003

[Experimental investigation of laser plasma soft X-ray source with gas target].

This paper describes a debris-free laser plasma soft X-ray source with a gas target, which has high operating frequency and can produce strong soft X-ray radiation. The valve of this light source is drived by a piezoelectrical ceramic whose operating frequency is up to 400 Hz. In comparison with laser plasma soft X-ray sources using metal target, the light source is debris-free. And it has higher operating frequency than gas target soft X-ray sources whose nozzle is controlled by a solenoid valve. A channel electron multiplier (CEM) operating in analog mode is used to detect the soft X-ray generated by the laser plasma source, and the CEM's output is fed to to a charge-sensitive preamplifier for further amplification purpose. Output charges from the CEM are proportional to the amplitude of the preamplifier's output voltage. Spectra of CO2, Xe and Kr at 8-14 nm wavelength which can be used for soft X-ray projection lithography are measured. The spectrum for CO2 consists of separate spectral lines originate mainly from the transitions in Li-like and Be-like ions. The Xe spectrum originating mainly from 4d-5f, 4d-4f, 4d-6p and 4d-5p transitions in multiply charged xenon ions. The spectrum for Kr consists of separate spectral lines and continuous broad spectra originating mainly from the transitions in Cu-, Ni-, Co- and Fe-like ions.

English Abstract↗