High-resolution scanning electron microscopy.

D C Joy; J B Pawley

doi:10.1016/0304-3991(92)90186-n

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PubMed · 1481281

High-resolution scanning electron microscopy.

D C Joy·J B Pawley

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Abstract

The spatial resolution of the scanning electron microscope is limited by at least three factors: the diameter of the electron probe, the size and shape of the beam/specimen interaction volume with the solid for the mode of imaging employed and the Poisson statistics of the detected signal. Any practical consideration of the high-resolution performance of the SEM must therefore also involve a knowledge of the contrast available from the signal producing the image and the radiation sensitivity of the specimen. With state-of-the-art electron optics, resolutions of the order of 1 nm are now possible. The optimum conditions for achieving such performance with the minimum radiation damage to the specimen correspond to beam energies in the range 1-3 keV. Progress beyond this level may be restricted by the delocalization of SE production and ultimate limits to electron-optical performance.

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Electrons Microscopy, Electron, Scanning Journal Article Research Support, U.S. Gov't, Non-P.H.S.Research Support, U.S. Gov't, P.H.S.Review

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D C Joy, J B Pawley. 1992. High-resolution scanning electron microscopy.. https://doi.org/10.1016/0304-3991(92)90186-n

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