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PubMed · 15943460

Nanometer patterning with ice.

Abstract

Nanostructures can be patterned with focused electron or ion beams in thin, stable, conformal films of water ice grown on silicon. We use these patterns to reliably fabricate sub-20 nm wide metal lines and exceptionally well-defined, sub-10 nanometer beam-induced chemical surface transformations. We argue more generally that solid-phase condensed gases of low sublimation energy are ideal materials for nanoscale patterning, and water, quite remarkably, may be among the most useful.

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BibTeXRIS

Gavin M King, Gregor Schürmann, Daniel Branton, Jene A Golovchenko. 2005. Nanometer patterning with ice.. https://doi.org/10.1021/nl050405n

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