SIMIPS: secondary ion mass image processing system.

Abstract

A secondary ion mass image processing system (SIMIPS) is presented as a quantitative image analysis tool, with emphasis on an efficient man-machine interface. The combined applications of digital image processing and pattern recognition ensure an intelligent problem-resolving scheme and optimal extraction of information. The system performance is evaluated, and typical applications are presented to illustrate the versatility and usefulness of SIMIPS in analyzing digital images.