High-resolution soft x-ray microscopy.

R Feder; E Spiller; J Topalian; A N Broers; W Gudat; B J Panessa; Z A Zadunaisky; J Sedat

doi:10.1126/science.406670

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PubMed · 406670

High-resolution soft x-ray microscopy.

R Feder·E Spiller·J Topalian·A N Broers·W Gudat·B J Panessa·Z A Zadunaisky·J Sedat

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Abstract

X-ray micrographs of biological materials have been obtained with a resolution better than 100 angstroms by using x-ray resist as the recording medium. A high-resolution scanning electron microscope with a short-focal-length final lens, operating in the "low-loss" mode, is used to make the smallest features in the x-ray replica visible.

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R Feder, E Spiller, J Topalian, A N Broers, W Gudat, B J Panessa, Z A Zadunaisky, J Sedat. 1977-07-15. High-resolution soft x-ray microscopy.. https://doi.org/10.1126/science.406670

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