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PubMed · 8241552

Selected area polishing for precision TEM sample preparation.

J B Liu·B M Tracy·R Gronsky
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Abstract

A selected area mechanical polishing technique has been developed to improve the precision of cross-sectional TEM sample preparation, based upon the early work of Benedict and colleagues [Benedict et al. (1990) MRS Symp. Proc. Vol. 199, p. 189]. TEM samples were made from a pre-selected section through the middle of a 1 micron wide band of transistors extending laterally for more than 1 mm by precise control over the plane of polish with a corresponding reduction in sample preparation time. To illustrate the application of this technique, a uniformly thin, electron transparent TEM sample of a single, specific, failed transistor is obtained from a 4 mm by 10 mm device array.

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Microscopy, ElectronSpecimen HandlingJournal ArticleResearch Support, Non-U.S. Gov'tResearch Support, U.S. Gov't, Non-P.H.S.

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J B Liu, B M Tracy, R Gronsky. 1993-10-01. Selected area polishing for precision TEM sample preparation.. https://doi.org/10.1002/jemt.1070260209

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