PubMed · 15450661
Thermal AFM: a thermopile case study.
Abstract
In this work, an atomic force microscope (AFM) with an integrated thermal sensor has been used to obtain the local spatial distribution of temperatures in a micromachined thermopile with submicron resolution. In this communication, we will show how the dimensional, structural and functional characteristics of a thermopile suits well with the requirements for AFM thermal imaging, and how a deeper insight of the thermopile operation can be gained with the aid of these advanced scanning probe-based tools.
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L Fonseca, F Pérez-Murano, C Calaza, R Rubio, J Santander, E Figueras, I Gràcia, C Cané, M Moreno, S Marco. 2004. Thermal AFM: a thermopile case study.. https://doi.org/10.1016/j.ultramic.2004.05.004
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