A silicon bidirectional flow sensor for measuring respiratory flow.

M J van Putten; M H van Putten; A F van Putten; J C Pompe; H A Bruining

doi:10.1109/10.552250

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PubMed · 9214800

A silicon bidirectional flow sensor for measuring respiratory flow.

M J van Putten·M H van Putten·A F van Putten·J C Pompe·H A Bruining

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Abstract

We describe a solid-state, silicon integrated, bidirectional flow sensor for respiratory applications. The sensor is a thermal vector sensor. The electronic circuitry for obtaining bidirectional sensitivity is presented together with actual application to a healthy volunteer put on mechanical ventilation. The sensor's input flow range is from -60 to +60 L/min, and its rise-time is < or = 40 ms and fall-time is < or = 60 ms. The effect of changes in gas composition as used in mechanically ventilated patients on the sensor output signal are estimated to be less than 2%. The temperature sensitivity is about -1.5% per degree Celsius.

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Equipment Design Humans Pulmonary Ventilation Respiration, Artificial Semiconductors Sensitivity and Specificity Silicon Temperature Thermal Conductivity Ventilators, Mechanical Journal Article

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M J van Putten, M H van Putten, A F van Putten, J C Pompe, H A Bruining. 1997. A silicon bidirectional flow sensor for measuring respiratory flow.. https://doi.org/10.1109/10.552250

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