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PubMed · 1962192

Microfabrication techniques for integrated sensors and microsystems.

K D Wise·K Najafi
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Abstract

Integrated sensors and actuators are rapidly evolving to provide an important link between very large scale integrated circuits and nonelectronic monitoring and control applications ranging from biomedicine to automated manufacturing. As they continue to expand, entire microsystems merging electrical, mechanical, thermal, optical, magnetic, and perhaps chemical components should be possible on a common substrate.

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K D Wise, K Najafi. 1991-11-29. Microfabrication techniques for integrated sensors and microsystems.. https://doi.org/10.1126/science.1962192

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